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Do you have problems with customization, and manufacturing a trial model and pilot system?
[Customization]
 

 

 
 

 

 

APCVD for Silicon Solar Cells AMAX1000s This is Continuous APCVD for Silicon Solar
Cells with higher through-put of 1000 wafers per hour film deposition system which is demonstrated by over 400 units shipping record of APCVD system.

  MOCVD System DoctorT
Designed for φ100mm - φ200mm wafers
Mass production of FeRAM-LSI has been realized by using our newly produced system
Widespread application of the field except PZT, SBT and Metal electrode.

 


 
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