Do you have
problems with customization, and manufacturing a trial model and
pilot system? [Customization]
APCVD
for Silicon Solar Cells AMAX1000s This is Continuous APCVD
for Silicon Solar
Cells with higher through-put of 1000 wafers per hour film deposition
system which is demonstrated by over 400 units shipping record
of APCVD system.
MOCVD
System DoctorT Designed for φ100mm - φ200mm wafers
Mass production of FeRAM-LSI has been realized by using our
newly produced system
Widespread application of the field except PZT, SBT and Metal
electrode.