AMAYA CO., LTD.
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Exhibition Information
type
D301
Multiple Single Wafer Atmospheric Pressure CVD System
type
D501
Batch type Atmospheric Pressure SiH
4
/O
3
CVD System
type
D601
Single Wafer Atmospheric Pressure TEOS/O
3
CVD System,
Single Wafer Atmospheric Pressure SiH
4
/O
2
CVD System
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