Technical questions

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System errors and troubles

Further product information

MOCVD system

Upgrading of your system
->Improvement in throughput
->Standby power saving
->Overhaul (reactor and transfer system)
->Multiple wafer-size process
(E.g.: φ200-mm wafer-capable system also allows φ150-mm wafer process.)
->Online available
->Others

System maintenance and periodic inspection

->Periodic overall inspection
(including the operating check of the transfer system and safety system)

Select your search criteria.Contact AMAYA via this inquiry form.

[Inquiry form]

Discontinued parts

*Information on discontinued parts is provided to customers that use our products as occasion demands.
Some alternative parts require installation operation. Contact us as necessary.

Second-hand systems

If you have an interest in our second-hand systems, click here >>Second-hand Systems .
Film type change (e.g.: Switching a film type for a NSG model to a BPSG model) and wafer size change are available.

Customization

If you have problems with customization, and manufacturing a trial model and pilot system, click here >>Customization.
Our tried-and-tested technology that has been cultivated in the field of continuous atmospheric pressure CVD will give you the satisfaction you desire.

For system purchase and any other questions, contact AMAYA via this inquiry form.

[Inquiry form]