Solar Cell Production Continuous High Volume APCVD for 125mm x 125mm cell and 156mm x 156mm cell.
AMAX1000S
- 1500 WPH at 156mm x 156mm cells
- Metal addition Free design and Long Term Stable Process with SiC Tray
Feature
- Meet with neeeds to process 125mm x 125mm or 156mm x 156mm Quasi Square Cells for High Volume Solar Cell Production.
- Developped High Speed Double Arm Tray Transfer Mechanism, Special Dispersion Head and La,p Heating System to realize High Volume Solar Cell Production.
- Special Wafer Pockets in SiC Tray is available.
- Multi Level Berrunnui Chuck helps unloading cells efficiently and coolthem down.
Performance
| Film Thickness Nu |
≦±10.0％ |
| Wafer Size |
125mm x 125mm or 156mm x 156mm Quasi or Full Square |
| Gas |
SiO4,O2, PH3, B2H6, N2 |
| Deposition Temp. |
～430℃ |
| Productivity |
1500 WPH(156mm x156mm) |
Specifictions
| System Size |
1860mm(W) x 5900mm(D) x 2100mm(H) |
| Heaters |
Heater Coils and Lamps |
| Loader/Unloader |
Loading VacuumChucks, Unloading Berrunuulii Chucks |
| Dispersion Head (Gas Nozzle) |
Long Width Dispersion Head |
